Modular surface mount manifold

ABSTRACT

A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may be mounted within a channel of a backing plate for structural support. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths. Additionally, the bridge fittings may be stacked to form multiple layers where bridge fittings of one layer may be in fluid communication with bridge fittings of another layer. The invention may further comprise seals provided in a recess between the fluid ports and the mating bridge fittings ends.

This application claims the benefit of U.S. provisional application No.60/076,871 filed on Mar. 5, 1998.

FIELD OF THE INVENTION

The invention relates in general to manifolds for fluid systems, andmore particularly, the invention relates to a modular gas distributionsystem for use in high purity fluid systems and corrosive fluid systemssuch as the clean room environment used to manufacture semiconductorwafers.

BACKGROUND OF THE INVENTION

To manufacture semiconductors, the industry uses various high puritygases. These gases are controlled by systems made up of high purityvalves, regulators, pressure transducers, mass flow controllers andother components connected together by welding and high purity metalseal fittings. These connections are undesirable in many applicationsbecause they add additional time and cost for welding operations,unnecessary space between components and make it difficult to replace acomponent located between other components. Further, these systems aretypically custom designed and manufactured which make the manufacturingcosts and procurement of replacement parts quite expensive.

New modular manifold systems have been recently introduced into theindustry in order to overcome these problems. Typical components ofthese systems such as valves, pressure regulators and other typicalfluid components have been reconfigured so that their inlet and outletports and attachment mechanisms are compatible with surface mountmanifolds. These manifolds are typically comprised of modular blockswhich are machined of high purity metal and have machined internal flowpassageways. These prior art modular systems typically utilize ametallic seal between the component and a modular block face to ensurenear leak-free seal integrity. One objective of such systems is to usesurface mount standard configurations based upon industry standards topermit interchangeability of surface mount components.

One disadvantage to these type of prior art modular systems is that theentire modular block is made of high purity metal. Thus money andnatural resources are inefficiently utilized. Further, these blockcomponents also have higher manufacturing costs due to the complexity ofmachining multiple passageways of a single block as well as a higherrisk of expensive scrap being formed due to the manufacturingcomplexity. Further, the mating blocks require the use of mating sealstherebetween, which require additional manufacturing time, and furtherrequire proper installation and makeup torque of the fastener members inorder to ensure a leak-tight seal.

SUMMARY OF THE INVENTION

Thus it is desired that a modular manifold design be provided whicheliminates the seals between modular mating blocks, dramatically reducesthe amount of expensive material utilized, and results in a simpler andcheaper system to manufacture while providing a reduced system footprintor envelope which meets or surpasses the performance, integrity andreliability of existing systems.

The invention provides in one aspect a bridge fitting for use in a fluidmanifold system for being in fluid communication with two or more fluidcomponents, such as valves, regulators, pressure transducers, mass flowcontrollers, and the like. The bridge fitting comprises a first elbowfitting connected to a second elbow fitting, with the connected elbowfittings having an internal fluid passageway therethrough. The internalpassageway of the bridge fitting has an inlet end and an outlet end,with the inlet end in fluid communication with an outlet port of thefirst fluid component, and the outlet end of the bridge fitting in fluidcommunication with an inlet end of a second fluid component.

The invention provides in another aspect a bridge fitting for use in afluid manifold system for being in fluid communication with three ormore fluid components, wherein one or more of said fluid components hasa single port. The bridge fitting comprises a first and second elbowfitting having a respective end connected to a tee fitting. The teefitting is located between the elbow fittings, with each of the elbowfittings and the tee fittings having an internal fluid passageway influid communication with each other. The internal passageway of thefittings have an inlet end and a first and second outlet end, with theinlet end in fluid communication with an outlet port of the first fluidcomponent, and the outlet ends of the fluid passageway being in fluidcommunication with an inlet end of a second and third fluid component,respectively.

The invention provides in yet another aspect a modular fluid manifoldsystem for connecting with one or more surface mount type fluidcomponents having an inlet port and an outlet port, the modular systemcomprising: one or more bridge fittings having an internal fluidpassageway therethrough; the internal passageway of the bridge fittinghaving an inlet end for connecting to an outlet port of the first fluidcomponent, and an outlet end for connecting to an inlet port of thesecond fluid component, whereby the internal fluid passageway of thebridge fitting is in fluid communication with the first and second fluidcomponents when the system is assembled.

Finally, the invention provides a modular fluid manifold system forconnecting with one or more fluid components comprising an inlet portand one or more outlet ports. The manifold system comprises one or morebridge fittings having an inlet end and an outlet end and an internalpassageway joining said ends therethrough. The system further includes alocator plate having an upper surface for mounting the fluid componentsthereon and a plurality of holes aligned with the inlet and outlet portsof the fluid components. The locator plate has a lower surface formounting the bridge fittings thereto. The inlet end of each of thebridge fittings are in fluid communication with an outlet port of afluid component, and an outlet end of each of the bridge fittings are influid communication with an inlet port of another fluid component.

These and other features and advantages of the invention will becomeapparent in the detailed description and claims to follow, taken inconjunction with the accompanying figures.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention may take physical form in certain parts and arrangementsof parts, a preferred embodiment of which will be described in detail inthis specification and illustrated in the accompanying drawings whichform a part hereof, and wherein:

FIG. 1 is a perspective view of the complete manifold assembly shownwith representative components and seals incorporating features of thesubject invention;

FIG. 2 is an exploded perspective of a manifold assembly andrepresentative components and seals incorporating features of thesubject invention as shown in FIG. 1;

FIG. 3 is an exploded elevational view of a portion of the manifold ofFIG. 2, showing one complete gas bridge located between two partiallyillustrated gas bridges and showing an optional representative seal;

FIG. 3 a is a cross-sectional view of the assembled manifold portion ofFIG. 2;

FIG. 3 b is a cross-sectional view of an alternative gas bridgeincorporating a tee fitting and an additional tube section, in additionto the two elbows and the tube section shown in the complete gas bridge8 illustrated in FIGS. 3 and 3 a; and

FIG. 4 is a perspective view of a alternative manifold system of thepresent invention which incorporates multiple flow paths extending invarious directions.

DETAILED DESCRIPTION OF THE INVENTION

Referring now to the drawings wherein the drawings are for the purposesof illustrating the preferred embodiments of the invention only and notfor purposes of limiting same, a unique manifold system is shown in theFIGS. 1-4. The inventions as shown and described in the Figures areuseful, for example, as part of a high purity modular gas distributionsystem used in the manufacture of semiconductor devices or other fluidsystems which must withstand corrosive fluids. The present invention isnot limited to the use in high purity fluid systems, and may be usefulin any application relating to fluid flow control.

Now referring to the drawings and more particularly FIG. 1, a modularfluid manifold system 10 is shown assembled together with fluid flowcontrol components such as valves 12, flow regulators 13, filters 14 andthe like. The fluid components may be utilized in conjunction with theinvention, but are not part of the invention. The fluid components 12-14are preferably surface mount type components, and each component has aninlet port 16 and may additionally comprise one or more outlet ports 18as shown in FIG. 3A, which allow fluid communication to the fluidcomponent. A series of fasteners 22 of the fluid components pass throughopenings 24 in the base flanges 26 of the fluid components in order tosecure the components to the modular manifold system 10.

The modular manifold system 10 of the present invention may comprise oneor more bridge fittings 50, an optional locator plate 30, an optionalbacking plate 40, optional end fittings 45, and optional sealingelements 60. These elements are described in more detail, below. Thebridge fittings 50, as shown in FIG. 3, are in the form of two elbowfittings 52 which are shown joined by an optional tubular extension 54connected to the respective ends of the elbow fittings 52 byconventional means such as by orbital welding. The elbow fittings 52have an interior fluid passageway 56 having an inlet end 58 and anoutlet end 62,64, with the inlet end 58 having a 90 degree orientationwith respect to the outlet end 62,64. The optional tubular extension 54has an internal fluid passageway which connects with the adjoining fluidpassageway of the two adjacent elbow end fittings 52, such that a Ushaped fluid passageway is formed within the interior of the bridgefitting 50, with the passageway having an inlet end 62 and an outlet end64. As shown in FIG. 3A, the inlet end 62 of the bridge fitting 50 is influid communication with a respective outlet opening 18 of a fluidcomponent 12, and the outlet end 64 of the bridge fitting 50 is in fluidcommunication with the inlet of an adjacent fluid component 13. Thus thebridge fitting 50, acts as a “bridge” to transfer fluid between adjacentfluid components such as 12,13 without the need for metal to metal sealsbetween adjacent bridge fittings 50, which is typically required by themating of adjacent prior art modular blocks. It is preferred that thebridge fitting 50 be comprised of stainless steel such as 316 or SCQ, orother material suitable for use in conjunction with semiconductorprocessing fluids. For typical industrial applications, any suitablematerial such as plastic or metal would work for the invention.

As shown in FIG. 1, the modular system 10 may also comprise end fittings45, which comprise an elbow fitting having a 90 degree internalpassageway connected to a standard fitting 46, such as a standardVCR-type fitting or other suitable fitting for connecting with a fluidline. The end fitting 45 may be utilized as an inlet fitting or anoutlet fitting which mates with the fluid line (not shown). Thus, theoutlet or inlet end of the elbow fitting is connected to the respectiveinlet or outlet end of a fluid component. It is preferred that the endfittings 45 be comprised of stainless steel, 316 stainless, SCQstainless or other material suitable for use in conjunction withsemiconductor processing fluids. For typical industrial applications,the end fittings 45 may be comprised of any suitable material such asplastic or metal.

The modular manifold system 10 of the present invention may furtheroptionally comprise a backing plate 40. The backing plate 40 maycomprise a flat plate, but it preferably has an interior groove orchannel 42 for receiving and securing a plurality of bridge fittings 50and end fittings 45 therein. Each elbow fitting 52 of the bridge fitting50 and the end fitting 45, has an exterior shaped body of a precisedimension which mates with the shape of the groove or channel 42. It ispreferred but not required that the external shape of the elbow fitting52 be rectangular or square. It is also preferred that the internal sidewalls 44 forming the channel 42 have a suitable dimension for closelyreceiving a square shaped body, or that two of the opposed side wallshave an appropriate dimension for receiving a rectangular shaped body.The invention is not limited to the above mentioned shapes, as anycomplementary shaped channel with respect to the shaped body of theelbow fitting 52 would work for the invention. The backing plate 40 maybe comprised of any suitable material such as metal, but it ispreferably made of a low-cost lightweight material such as aluminum.

In one embodiment of the invention (not shown), the channel 42 is of asufficient depth such that the bridge fittings 50 and the end fittings45 can be completely received within the channel 42 such that a recessis formed (not shown) for receiving a seal 60 between the inlet 62 andoutlet 64 of the bridge fittings and the opposed channel walls 44. Inorder to assemble the system in this embodiment, the bridge fittings 50are inserted within the channel 42 of the backing plate 40, such thatthe bridge fittings 50 are spaced to have minimal clearance betweenadjoining bridge fittings 52. Next, the inlet and outlet ports of thefluid components 12-14 are carefully aligned with the respective outletand inlet ports of the pertinent bridge fittings. For example, an inletend of a first bridge fitting 50 is aligned for fluid communication withan outlet of a first fluid component. Next, the outlet end of the firstbridge fitting 50 is aligned with the inlet of a second fluid componentwhich is adjacent to the first fluid component. After the inlet andoutlet ports are carefully aligned, the fasteners 22 are insertedthrough holes 24 of the flanges 26 of the fluid components and intomating holes (not shown) of the backing plate 40, such that the fluidcomponents are secured to the backing plate 40.

It is preferable that the manifold system 10 further comprise seals 60,which are received between the mating inlet/outlet ports of the bridgefittings 50 and the fluid components. The seals 60 may be made of anysuitable material such as elastomer, plastic, rubber or polymer materialand preferably, a soft metal such as nickel. C seals may also be used,as well as composite seals to name additional examples. Other sealtechnologies which may used in conjunction with the invention will bereadily apparent to those ordinarily skilled in the art.

In a second embodiment of the invention as illustrated in FIGS. 2, 3 and3A, an optional locator plate 30 may be utilized with the invention. Thelocator plate 30 has a plurality of holes aligned to receive the ends62,64 of the bridge fittings 50 therein. The ends of the bridge fittings50 are preferably slightly shorter than the thickness of the locatorplate 30 such that a recess is formed for receiving a seal 60 therein.The locator plate 30 additionally has holes 32 aligned for receivingfasteners 22 therein. Thus in order to assemble the system pursuant tothe second embodiment of the invention, the bridge fittings are placedwithin the channel 42 of the backing plate 40, and then the holes of thelocator plate are aligned with the inlet and outlet end of the bridgefittings 50. The locator plate is then lowered into position such thatthe ends of bridge fittings 50 are inserted through the aligned holes 34of the locator plate 30. Fasteners 36 are then inserted through alignedholes 38 of the backing plate for reception into aligned holes 39 of thelocator plate 30. Lastly, the fluid components 12-14 are then secured tothe locator plate 30 using fasteners 22.

An alternative embodiment of a bridge-tee fitting 70 is shown in FIG. 3b. This bridge fitting 70 may be used in conjunction with three adjacentfluid components, wherein the middle fluid component has only one inletport, e.g., a pressure transducer. The bridge fitting 70 is comprised oftwo elbow fittings 52, each having an internal fluid passageway in fluidcommunication with a tee fitting 72. The tee fitting 72 has an inlet end74, and two outlet ends 76, 78. Outlet end 76 of the tee fitting 70 isin fluid communication with the inlet of a single port fluid componentsuch as a pressure transducer. The outlet end 78 of the tee fitting isin fluid communication with the outlet end 80 of the bridge fitting.Thus the bridge tee fitting 70 has an inlet end 82 and two outlet ends76 and 80, and may be used to “bridge” or transfer the flow betweenthree adjacent fluid components, wherein the middle fluid component hasonly a single port.

FIG. 4 shows yet another embodiment of a locator plate 80 designed foruse with fluid flowing in multiple flow paths A, B, C and D. In order tobetter illustrate the invention, the backside of the locator plate isshown with respect to the bridges 50 (i.e., the opposite of FIG. 2). Thearrangement of the bridges 50 within the holes 82 of the locator plateallow for the combination or mixing of fluids from one or more flowpaths. Thus as shown in FIG. 4, four independent flow paths are shown(A, B, C and D) which are mixed together in desired proportions by fluidcomponents (not shown) which result in the fluid outlet 86 of the systemto be comprised of the fluids A, B, C and D mixed in a desiredproportion. This is accomplished by using a fluid component such as avalve having a three port configuration (at locations 84) in order toallow for the mixture of the different fluids from separate flow paths.Note that the bridge fittings 50 are combined in a “pegboard” stylearrangement in order to achieve the desired result as described above.Thus bridges 50 are used to interlink or join the separate flow paths inorder to achieve the fluid mixing, without the need for any speciallyadapted components. This is a distinct advantage over prior art blocktype modular designs, as a special block having three ports would beneeded.

In this embodiment of the invention, the locator plate 80 may be used toboth as a support for the bridges 50 and as a “locator” without the needfor a support plate. The bridge fittings 50 may further comprise athreaded end (not shown) which can be inserted into aligned threadedholes 82 of the locator plate 80. The ends 62,64 of the bridge fittings50 may also be press fit into the aligned holes 82 of the locator plate80 or be attached by retainer clips (not shown) to the locator plate.Other attachment means may be readily apparent to those ordinarilyskilled in the art.

In this embodiment of the invention, the ends 62,64 of the bridgefittings 50 may vary in height, with a height sufficient to allowmultiple layers of bridge fittings (not shown).

This cross layer feature would be useful, for example, if it weredesired to provide purge gas in Line A to the other gas lines B, C andD. In order to accomplish this, a modified bridge fitting 50 would beneeded which would additionally comprise a tee fitting for mating withthe bridge fitting of an upper layer. The tee fitting would be locatedbetween the elbow fittings as shown in FIG. 3 b, and have an internalfluid passageway in communication with the internal fluid passageways ofthe elbow fittings. However, unlike FIG. 3B, the opening of the teefitting would be 180 degrees opposite of the openings of the elbowfittings in order to mate with the tee fitting of a bridge fittinglocated in another layer. Thus this embodiment of the invention wouldresult in a fluid manifold system having multiple fluid flow paths, withsaid paths being capable of extending in multiple directions. Further,this embodiment allows for multiple or three dimensional layering of gasflow paths, wherein the fluid flow paths of one layer may be in fluidcommunication with the fluid flow path of another layer(s).

In summary, the invention provides a bridge fitting which may be used toform a gas or fluid flow path in conjunction with fluid components whichare preferably surface mount components. These bridge fittings eliminatethe need for mating seals needed between adjacent blocks of the priorart, and they are much simpler and cheaper to manufacture. Further, theinvention provides for easy installation of multiple fluid flow pathsand fluid components in multiple directions and layers. The inventionalso provides for the interchangeability of fluid components whileallowing easy access to the components for ease of maintenance.

While the preferred embodiments of the invention has been illustratedand described, it should be understood that variations will becomeapparent to those skilled in the art. Accordingly, the invention is notlimited to the specific embodiments illustrated and described herein,but rather the true scope and spirit of the invention are to bedetermined by reference to the appended claims.

1-11. (canceled)
 12. A fluid manifold system for connecting two or morefluid components in fluid communication with each other, the manifoldsystem comprising: one or more bridge fittings having an inlet end andan outlet end and an internal fluid passageway joining said ends; asupport surface having at least two fluid components supported thereby,and a groove that is formed in and recessed from said surface andextends below said fluid components, said one or more bridge fittingsbeing disposed at least partially within said groove and providing fluidcommunication between said at least two fluid components. 13-17.(canceled)
 18. The system of claim 12 wherein said one or more bridgefittings comprises coplanar ports that provide fluid communicationbetween coplanar ports of said at least two fluid components.
 19. Thesystem of claim 12 wherein said support surface is disposed below aplate on which said fluid components are mounted.
 20. The system ofclaim 12 wherein each said fluid component comprises a mounting surfacethat faces said support surface, each said fluid component comprising atleast one fluid port formed in said mounting surface.
 21. The system ofclaim 20 wherein each said fluid component comprising at least two fluidports formed in said mounting surface, said at least two fluid portsbeing coplanar with respect to each other.